nkhani

Ukadaulo wodula waya wa diamondi umadziwikanso kuti ukadaulo wodula wophatikizana. Ndi kugwiritsa ntchito njira ya electroplating kapena resin bonding ya diamondi yolumikizidwa pamwamba pa waya wachitsulo, waya wa diamondi ukugwira ntchito mwachindunji pamwamba pa ndodo ya silicon kapena ingot ya silicon kuti upange kugaya, kuti ukwaniritse zotsatira zodula. Kudula waya wa diamondi kumakhala ndi mawonekedwe a liwiro lodula mwachangu, kulondola kwambiri kodula komanso kutayika kochepa kwa zinthu.

Pakadali pano, msika wa kristalo umodzi wodula waya wa diamondi wa silicon wavomerezedwa mokwanira, koma wakumananso ndi izi mu ndondomeko yotsatsa, pakati pawo pali vuto lofala kwambiri la velvet white. Poganizira izi, pepalali likuyang'ana momwe mungapewere vuto lodula waya wa diamondi wa monocrystalline silicon wafer velvet white.

Njira yoyeretsera waya wa diamondi kudula monocrystalline silicon wafer ndikuchotsa silicon wafer yodulidwa ndi makina odulira waya kuchokera pa resin plate, kuchotsa mzere wa rabara, ndikutsuka silicon wafer. Zipangizo zoyeretsera makamaka ndi makina oyeretsera asanayambe (makina ochotsera gumming) ndi makina oyeretsera. Njira yayikulu yoyeretsera makina oyeretsera asanayambe ndi: kudyetsa-kupopera-kupopera-kupopera-kutsukira-kutsuka ...

Mfundo yopangira velvet ya kristalo imodzi

Chophimba cha silicon cha monocrystalline ndi chizindikiro cha kuwonongeka kwa anisotropic kwa chophimba cha silicon cha monocrystalline. Mfundo ya reaction ndi equation yotsatirayi ya chemical reaction:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

Mwachidule, njira yopangira suede ndi iyi: Njira yothetsera dzimbiri ya NaOH yosiyana ndi dzimbiri ya pamwamba pa kristalo, (100) liwiro la dzimbiri pamwamba kuposa (111), kotero (100) ku monocrystalline silicon wafer pambuyo pa dzimbiri la anisotropic, pamapeto pake limapangidwa pamwamba pa (111) cone ya mbali zinayi, yomwe ndi kapangidwe ka "piramidi" (monga momwe tawonetsera pachithunzi 1). Pambuyo pa kapangidwe kameneka, kuwala kukafika pa piramidi yotsetsereka pa ngodya inayake, kuwalako kudzawonekera ku mtunda wina pa ngodya ina, ndikupanga kuyamwa kwachiwiri kapena kuposerapo, motero kuchepetsa kunyezimira pamwamba pa silicon wafer, ndiko kuti, kuwala kwa trap effect (onani Chithunzi 2). Kukula ndi kufanana kwa kapangidwe ka "piramidi" kukakhala bwino, kumawonekera bwino kwambiri, ndipo kutsika kwa emitrate pamwamba pa silicon wafer.

Chithunzi 1: Micromorphology ya monocrystalline silicon wafer pambuyo pa kupanga alkali

Chithunzi 2: Mfundo ya msampha wopepuka wa kapangidwe ka "piramidi"

Kusanthula kwa kuyera kwa kristalo imodzi

Pogwiritsa ntchito maikulosikopu ya electron pa wafer yoyera ya silicon, zinapezeka kuti kapangidwe ka piramidi ya wafer yoyera m'derali sikunapangidwe kwenikweni, ndipo pamwamba pake pankaoneka kuti panali zotsalira za "waxy", pomwe kapangidwe ka piramidi ka suede m'dera loyera la wafer yomweyo ya silicon kanapangidwa bwino (onani Chithunzi 3). Ngati pali zotsalira pamwamba pa wafer ya monocrystalline silicon, pamwamba pake padzakhala ndi kukula kwa kapangidwe ka "piramidi" komanso kupanga kofanana ndipo zotsatira za malo abwinobwino sizokwanira, zomwe zimapangitsa kuti kuwunikira kwa pamwamba pa velvet kotsalira ndikokwera kuposa malo abwinobwino, malo omwe ali ndi kuwunikira kwakukulu poyerekeza ndi malo abwinobwino omwe amawonekera ngati oyera. Monga momwe tingawonere kuchokera ku mawonekedwe ogawa a malo oyera, si mawonekedwe wamba kapena wamba m'dera lalikulu, koma m'madera am'deralo okha. Ziyenera kukhala kuti zonyansa zakomweko pamwamba pa wafer ya silicon sizinatsukidwe, kapena momwe zinthu zilili pamwamba pa wafer ya silicon zimayambitsidwa ndi kuipitsidwa kwachiwiri.

Chithunzi 3: Kuyerekeza kusiyana kwa kapangidwe ka zigawo mu ma wafer oyera a silika oyera a velvet

Pamwamba pa waya wa diamondi wodula silicon wafer ndi wosalala kwambiri ndipo kuwonongeka kwake ndi kochepa (monga momwe tawonetsera pa Chithunzi 4). Poyerekeza ndi wafer wa silicon wafer wodula silicon wafer, liwiro la reaction la alkali ndi waya wa diamondi wodula silicon wafer ndi locheperapo kuposa la wafer wa silicon wodula silicon wafer wodula diamondi, kotero mphamvu ya zotsalira pamwamba pa velvet ndi yoonekeratu.

Chithunzi 4: (A) Micrograph pamwamba pa matope odulidwa a silikoni (B) micrograph pamwamba pa diamondi waya wodulidwa wa silikoni

Gwero lalikulu lotsala la pamwamba pa waya wa silicon wodulidwa ndi waya wa diamondi

(1) Choziziritsira: zigawo zazikulu za choziziritsira cha waya wa diamondi ndi choziziritsira, chosungunula, chodetsa ndi madzi ndi zina. Madzi odulira omwe amagwira ntchito bwino amakhala ndi kuyimitsidwa bwino, kufalikira komanso kuthekera kosavuta kuyeretsa. Ma surfactants nthawi zambiri amakhala ndi mphamvu zabwino zophikira madzi, zomwe zimakhala zosavuta kuyeretsa poyeretsa silicon wafer. Kusakaniza ndi kufalikira kosalekeza kwa zowonjezerazi m'madzi kumabweretsa thovu lalikulu, zomwe zimapangitsa kuti madzi aziyenda pang'onopang'ono, zomwe zimakhudza magwiridwe antchito ozizira, komanso mavuto akuluakulu a thovu komanso ngakhale kusefukira kwa thovu, zomwe zimakhudza kwambiri kugwiritsa ntchito. Chifukwa chake, choziziritsira nthawi zambiri chimagwiritsidwa ntchito ndi choziziritsira madzi. Pofuna kuonetsetsa kuti madzi akuyenda bwino, silicone ndi polyether yachikhalidwe nthawi zambiri zimakhala zosagwira bwino madzi. Chosungunulira m'madzi chimakhala chosavuta kunyamula ndipo chimakhala pamwamba pa silicon wafer poyeretsa pambuyo pake, zomwe zimapangitsa kuti pakhale vuto la malo oyera. Ndipo sichikugwirizana bwino ndi zigawo zazikulu za choziziritsira, Chifukwa chake, chiyenera kupangidwa m'zigawo ziwiri, Zigawo zazikulu ndi zochotsera poizoni zinawonjezedwa m'madzi, Pakugwiritsa ntchito, malinga ndi momwe thovu lilili, Sichingathe kuwongolera kuchuluka kwa mankhwala oletsa poizoni, Chimalola mosavuta kuchuluka kwa mankhwala ochotsera poizoni, Zomwe zimapangitsa kuti pakhale kuchuluka kwa zotsalira za silicon wafer pamwamba, Komanso ndizosavuta kugwiritsa ntchito, Komabe, chifukwa cha mtengo wotsika wa zipangizo zopangira ndi zochotsera poizoni, Chifukwa chake, ambiri mwa ochotsera poizoni m'nyumba amagwiritsa ntchito njira iyi; Choziziritsira china chimagwiritsa ntchito mankhwala atsopano ochotsera poizoni, Chikhoza kugwirizana bwino ndi zigawo zazikulu, Palibe zowonjezera, Chikhoza kuwongolera bwino kuchuluka kwake, Chikhoza kupewa kugwiritsa ntchito mopitirira muyeso, Zochitazo ndizosavuta kuchita, Ndi njira yoyenera yoyeretsera, Zotsalira zake zimatha kulamulidwa mpaka pamlingo wotsika kwambiri, Ku Japan ndi opanga angapo am'nyumba amagwiritsa ntchito njira iyi, Komabe, chifukwa cha mtengo wake wapamwamba wa zinthu zopangira, Ubwino wake wa mtengo suwonekera.

(2) Mtundu wa guluu ndi resin: mu gawo lotsatira la njira yodulira waya wa diamondi, silicon wafer pafupi ndi kumapeto kolowera yadulidwa kale, silicon wafer kumapeto kotulukira siinadulidwebe, waya wa diamondi wodulidwa koyambirira wayamba kudula mpaka pa rabara ndi mbale ya resin, Popeza guluu wa ndodo ya silicon ndi bolodi la resin zonse ndi zinthu za epoxy resin, malo ake ofewa kwenikweni ndi pakati pa 55 ndi 95℃, Ngati malo ofewa a rabara kapena mbale ya resin ndi otsika, imatha kutentha mosavuta panthawi yodulira ndikupangitsa kuti ikhale yofewa ndikusungunuka, Yolumikizidwa ndi waya wachitsulo ndi pamwamba pa silicon wafer, Chifukwa cha kuthekera kodulira kwa mzere wa diamondi kuchepa, Kapena ma silicon wafer amalandiridwa ndikupakidwa utoto ndi resin, Akalumikizidwa, zimakhala zovuta kwambiri kutsuka. Kuipitsidwa koteroko kumachitika makamaka pafupi ndi m'mphepete mwa silicon wafer.

(3) ufa wa silikoni: Pakudula waya wa diamondi, ufa wa silikoni umapangidwa ndi ufa wambiri wa silikoni, ndipo kudulako kumapanga ufa wochuluka wa silikoni, womwe umapangidwa ndi matope, umakhala wochuluka kwambiri, ndipo ufawo umakhala wokwanira, umamatira pamwamba pa silikoni, ndipo kudula waya wa silikoni ndi waya wa diamondi kumapangitsa kuti ufa wa silikoni ukhale wosavuta kuumeza, zomwe zimapangitsa kuti ukhale wovuta kuuyeretsa. Chifukwa chake, onetsetsani kuti coolant yasinthidwa bwino ndipo muchepetse ufa womwe uli mu coolant.

(4) chotsukira: Makina odulira waya wa diamondi omwe amagwiritsidwa ntchito kwambiri ndi opanga odulira waya wa diamondi nthawi yomweyo amagwiritsa ntchito nthawi yomweyo kudula matope, makamaka amagwiritsa ntchito kutsuka matope, njira yoyeretsera ndi chotsukira, ndi zina zotero, ukadaulo wodulira waya wa diamondi umodzi kuchokera ku njira yodulira, kupanga mzere wathunthu, choziziritsira ndi chodulira cha matope zimakhala ndi kusiyana kwakukulu, kotero njira yoyeretsera yofananira, mlingo wa chotsukira, fomula, ndi zina zotero ziyenera kukhala zodulira waya wa diamondi. Chotsukira ndi gawo lofunika kwambiri, chotsukira choyambirira cha surfactant sichili choyenera kutsuka matope a diamondi, chiyenera kukhala pamwamba pa matope a silicon, kapangidwe kake ndi zotsalira za pamwamba pa chotsukira, ndipo chimagwiritsidwa ntchito ndi njira yoyeretsera. Monga tafotokozera pamwambapa, kapangidwe ka chotsukira sichifunikira pakudula matope.

(5) Madzi: kudula waya wa diamondi, kutsuka kale ndi kuyeretsa madzi odzaza ndi zinthu zodetsedwa, amatha kulowetsedwa pamwamba pa silicon wafer.

Chepetsani vuto lopangitsa tsitsi la velvet kukhala loyera ngati malangizo

(1) Kugwiritsa ntchito choziziritsira ndi kufalikira bwino, ndipo choziziritsiracho chikufunika kugwiritsa ntchito chotsukira mpweya chotsika kuti muchepetse zotsalira za zigawo zoziziritsira pamwamba pa silicon wafer;

(2) Gwiritsani ntchito guluu woyenera ndi mbale ya resin kuti muchepetse kuipitsa kwa silicon wafer;

(3) Choziziritsira chimasungunuka ndi madzi oyera kuti zitsimikizire kuti palibe zodetsa zosavuta zomwe zimatsalira m'madzi omwe agwiritsidwa ntchito;

(4) Pamwamba pa waya wa diamondi wodulidwa wa silikoni, gwiritsani ntchito chotsukira choyenera kwambiri;

(5) Gwiritsani ntchito njira yobwezeretsa madzi ya diamondi line coolant online kuti muchepetse kuchuluka kwa ufa wa silicon panthawi yodula, kuti muwongolere bwino zotsalira za ufa wa silicon pamwamba pa wafer wa silicon. Nthawi yomweyo, imathanso kuwonjezera kutentha kwa madzi, kuyenda kwake ndi nthawi yotsuka isanakwane, kuti muwonetsetse kuti ufa wa silicon watsukidwa nthawi yake.

(6) Kapepala ka silicon kakayikidwa patebulo loyeretsera, kayenera kutsukidwa nthawi yomweyo, ndikusunga kapepala ka silicon konyowa nthawi yonse yoyeretsera.

(7) Chophimba cha silicon chimasunga pamwamba pa madzi pamene chikuchotsedwa mu gum, ndipo sichingaume mwachilengedwe. (8) Poyeretsa chophimba cha silicon, nthawi yomwe imaonekera mumlengalenga ingachepe momwe zingathere kuti maluwa asatuluke pamwamba pa chophimba cha silicon.

(9) Ogwira ntchito yoyeretsa sayenera kukhudza mwachindunji pamwamba pa silicon wafer panthawi yonse yoyeretsa, ndipo ayenera kuvala magolovesi a rabara, kuti asasindikize zala.

(10) Poyerekeza [2], mbali ya batri imagwiritsa ntchito njira yoyeretsera ya hydrogen peroxide H2O2 + alkali NaOH malinga ndi kuchuluka kwa voliyumu ya 1:26 (3% NaOH solution), zomwe zingathandize kuchepetsa bwino vutolo. Mfundo yake ndi yofanana ndi yankho loyeretsera la SC1 (lomwe limadziwika kuti madzi 1) la semiconductor silicon wafer. Njira yake yayikulu: filimu ya okosijeni pamwamba pa silicon wafer imapangidwa ndi okosijeni wa H2O2, yomwe imadyedwa ndi NaOH, ndipo okosijeni ndi dzimbiri zimachitika mobwerezabwereza. Chifukwa chake, tinthu tomwe timalumikizidwa ndi ufa wa silicon, utomoni, chitsulo, ndi zina zotero) timagweranso mumadzi oyeretsera ndi wosanjikiza wa dzimbiri; chifukwa cha okosijeni wa H2O2, zinthu zachilengedwe pamwamba pa wafer zimasungunuka kukhala CO2, H2O ndikuchotsedwa. Njira yoyeretsera iyi yakhala ikugwiritsidwa ntchito ndi opanga ma silicon wafer pogwiritsa ntchito njira iyi pokonza kuyeretsa waya wa diamondi kudula monocrystalline silicon wafer, silicon wafer m'nyumba ndi ku Taiwan ndi opanga ena a batri pogwiritsa ntchito madandaulo a velvet white. Palinso opanga ma batri agwiritsa ntchito njira yofanana ya velvet pre-cleaning, komanso amawongolera bwino mawonekedwe a velvet white. Zikuoneka kuti njira yoyeretsera iyi imawonjezeredwa mu njira yoyeretsera ya silicon wafer kuti ichotse zotsalira za silicon wafer kuti ithetse bwino vuto la tsitsi loyera kumapeto kwa batri.

mapeto

Pakadali pano, kudula waya wa diamondi kwakhala ukadaulo waukulu wopangira zinthu m'munda wa kudula kwa kristalo kamodzi, koma polimbikitsa vuto lopanga velvet yoyera, opanga mabatire akhala akuvutitsa opanga mabatire, zomwe zimapangitsa kuti opanga mabatire azidula waya wa diamondi. Silicon wafer imakhala ndi kukana pang'ono. Kudzera mu kusanthula koyerekeza kwa malo oyera, izi zimachitika makamaka chifukwa cha zotsalira pamwamba pa silicon wafer. Pofuna kupewa bwino vuto la silicon wafer mu selo, pepalali limafotokoza magwero omwe angawononge pamwamba pa silicon wafer, komanso malingaliro ndi miyeso yopangira. Malinga ndi kuchuluka, dera ndi mawonekedwe a madontho oyera, zomwe zimayambitsa zitha kufufuzidwa ndikuwongoleredwa. Ndikofunikira kwambiri kugwiritsa ntchito hydrogen peroxide + njira yoyeretsera alkali. Chidziwitso chopambana chatsimikizira kuti chingapewe bwino vuto la kudula waya wa diamondi wafer wa silicon kupanga velvet whitening, kuti tigwiritse ntchito kwa akatswiri ndi opanga ambiri.