nkhani

Diamondi waya kudula luso amadziwikanso kuti kuphatikiza abrasive kudula luso.Ndi ntchito electroplating kapena utomoni chomangira njira ya diamondi abrasive anaphatikizana pamwamba pa zitsulo waya, diamondi waya mwachindunji akuchita pamwamba pa pakachitsulo ndodo kapena pakachitsulo ingot kubala akupera, kukwaniritsa zotsatira za kudula.Kudula waya wa diamondi kumakhala ndi mawonekedwe othamanga mwachangu, kulondola kwambiri komanso kutayika kwa zinthu zochepa.

Pakalipano, msika umodzi wa kristalo wa diamondi wodula waya wa silicon wavomerezedwa mokwanira, koma wakumananso ndi ndondomeko yopititsa patsogolo, yomwe velvet yoyera ndiyo vuto lalikulu.Poganizira izi, pepalali likunena za momwe mungapewere vuto la diamondi waya wodula monocrystalline silicon wafer velvet woyera vuto.

Njira yoyeretsera mawaya a diamondi kudula monocrystalline silicon chowotcha ndikuchotsa chophatika cha silicon chodulidwa ndi chida cha makina a mawaya pa mbale ya utomoni, kuchotsa chingwe cha rabala, ndikuyeretsa chowotcha cha silicon.Zida zoyeretsera makamaka makina oyeretsera (makina a degumming) ndi makina oyeretsera.Njira yayikulu yoyeretsera makina oyeretsera chisanadze ndi: kudyetsa-spray-spray-ultrasonic kuyeretsa-degumming-madzi oyera rinsing-underfeeding.Njira yaikulu yoyeretsera makina oyeretsera ndi: kudyetsa-madzi oyeretsera-madzi oyeretsera-madzi oyeretsera-alkali kutsuka-alkali kutsuka-madzi oyeretsera-madzi oyeretsera-asanayambe kutaya madzi m'thupi (kukweza pang'onopang'ono) -kuyanika-kudyetsa.

Mfundo ya single-crystal velvet kupanga

Monocrystalline silicon wafer ndi mawonekedwe a anisotropic corrosion wa monocrystalline silicon wafer.The reaction principle ndi awa chemical reaction equation:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

Kwenikweni, njira yopangira suede ndi: njira ya NaOH yodziwira mitundu yosiyanasiyana ya kristalo, (100) kuthamanga kwapamwamba kuposa (111), kotero (100) ku chowotcha cha silicon cha monocrystalline pambuyo pakuwonongeka kwa anisotropic, kenako chimapangidwa pamwamba (111) cone ya mbali zinayi, yomwe ndi "piramidi" (monga momwe tawonetsera pa chithunzi 1).Pambuyo popanga mapangidwe, kuwala kukakhala kotsetsereka kwa piramidi pamalo enaake, kuwalako kumawonekera kumalo otsetsereka pa Angle ina, kupanga mayamwidwe achiwiri kapena ochulukirapo, motero kuchepetsa kuwunikira pamwamba pa silicon wafer. , ndiko kuti, kuwala kwa msampha (onani Chithunzi 2).Kukula bwino ndi kufanana kwa kapangidwe ka "piramidi", kumapangitsa kuti msampha uwoneke bwino, komanso kutsika kwa emitrate kwa silicon wafer.

Chithunzi 1: Micromorphology ya monocrystalline silicon wafer pambuyo pa kupanga alkali

Chithunzi 2: Mfundo ya msampha wopepuka wa kapangidwe ka "piramidi".

Kusanthula kwa kristalo umodzi woyera

Poyang'ana maikulosikopu ya ma elekitironi pa choyikapo choyera cha silicon, zidapezeka kuti piramidi yaying'ono ya chotupa choyera m'derali sichinapangidwe, ndipo pamwamba pakuwoneka ngati pali zotsalira za "waxy", pomwe piramidi ya suede idapangidwa. m'dera loyera la silicon wafer lomwelo linapangidwa bwino (onani Chithunzi 3).Ngati pali zotsalira pamwamba pa monocrystalline silicon wafer, pamwamba padzakhala ndi malo otsalira a "piramidi" kukula kwake ndi kufanana kwa mbadwo ndi zotsatira za dera lachilendo ndizosakwanira, zomwe zimapangitsa kuti velvet yotsalira pamwamba ikhale yowonjezereka kuposa malo abwino. dera lokhala ndi mawonekedwe owoneka bwino poyerekeza ndi malo owoneka bwino owoneka ngati oyera.Monga momwe zikuwonekera kuchokera ku mawonekedwe a kugawa kwa dera loyera, sizowoneka nthawi zonse kapena zokhazikika m'dera lalikulu, koma m'madera am'deralo.Ziyenera kukhala kuti zowononga zam'deralo zomwe zili pamtunda wa silicon wafer sizinayeretsedwe, kapena mawonekedwe a pamwamba pa silicon wafer amayamba chifukwa cha kuipitsidwa kwachiwiri.

Chithunzi 3: Kufananiza kusiyana kwa zigawo za microstructure mu velvet white silicon wafers

Pamwamba pa waya wa diamondi wodula silicon wafer ndi wosalala kwambiri ndipo kuwonongeka kwake kumakhala kochepa (monga momwe tawonetsera pa Chithunzi 4).Poyerekeza ndi matope a silicon wafer, kuthamanga kwa alkali ndi waya wa diamondi kudula silicon wafer pamwamba ndi pang'onopang'ono kusiyana ndi matope omwe amadula matope a monocrystalline silicon wafer, kotero mphamvu ya zotsalira za pamwamba pa velvet zimaonekera kwambiri.

Chithunzi 4: (A) Pamwamba pa micrograph ya matope odulidwa silicon wafer (B) pamwamba pa micrograph ya diamondi yodula silicon wafer

Gwero lalikulu lotsalira la diamondi waya wodulidwa silicon wafer pamwamba

(1) Coolant: zigawo zikuluzikulu za diamondi waya kudula ozizira ozizira ndi surfactant, dispersant, defamagent ndi madzi ndi zigawo zina.Madzi odulira omwe ali ndi magwiridwe antchito abwino amakhala ndi kuyimitsidwa kwabwino, kubalalitsidwa komanso kuthekera kosavuta kuyeretsa.Ma surfactants nthawi zambiri amakhala ndi ma hydrophilic properties, omwe ndi osavuta kuyeretsa poyeretsa silicon wafer.Kugwedezeka kosalekeza ndi kufalikira kwa zowonjezera izi m'madzi kumatulutsa thovu lalikulu, zomwe zimapangitsa kuchepa kwa mpweya wozizirira, zomwe zimakhudza kuzizira, komanso chithovu chachikulu komanso zovuta kusefukira kwa thovu, zomwe zingakhudze kwambiri kugwiritsa ntchito.Chifukwa chake, choziziritsa nthawi zambiri chimagwiritsidwa ntchito ndi defoaming agent.Pofuna kuwonetsetsa kuti ntchito yochotsa thovu, silikoni yachikhalidwe ndi polyether nthawi zambiri imakhala yosauka kwa hydrophilic.Zosungunulira m'madzi ndizosavuta kutsatsa ndikukhalabe pamwamba pa chowotcha cha silicon pakuyeretsa kotsatira, zomwe zimapangitsa vuto la malo oyera.Ndipo sizigwirizana bwino ndi zigawo zikuluzikulu za zoziziritsa kukhosi, Choncho, ziyenera kupangidwa mu zigawo ziwiri, zigawo zikuluzikulu ndi defoaming wothandizira anawonjezedwa m'madzi, Pamene ntchito, malinga ndi thovu zinthu, Kulephera quantitatively kulamulira kugwiritsa ntchito ndi Mlingo wa antifoam agents, Zitha kulola kuti kuchulukitsitsa kwa ma anoaming agents, Kupangitsa kuti zotsalira za silicon wafer pamwamba zichuluke, zimakhalanso zovuta kugwira ntchito, Komabe, chifukwa chotsika mtengo wazinthu zopangira ndi defoaming wothandizila yaiwisi. zipangizo, Choncho, ambiri ozizira m'nyumba onse ntchito chilinganizo dongosolo;Kuzizira kwina kumagwiritsa ntchito chotsitsa chatsopano, Kutha kumagwirizana bwino ndi zigawo zazikulu, Palibe zowonjezera, Kutha kuwongolera moyenera komanso mochulukira kuchuluka kwake, Kumatha kupewa kugwiritsa ntchito mopitilira muyeso, Zolimbitsa thupi ndizosavuta kuchita, Ndi njira yoyenera yoyeretsera, Yake. zotsalira zikhoza kulamulidwa kwa milingo otsika kwambiri, Ku Japan ndi ochepa opanga zoweta atengera dongosolo chilinganizo, Komabe, chifukwa cha mtengo wake mkulu zopangira, mtengo wake phindu si zoonekeratu.

(2) Mtundu wa Glue ndi utomoni: Pamapeto pake njira yodulira waya wa diamondi, Chophimba cha silicon pafupi ndi mapeto omwe akubwera chadulidwa pasadakhale, Chophika cha silicon pamapeto pake sichinadulidwebe, Daimondi yodulidwa koyambirira. waya wayamba kudula ku mphira wosanjikiza ndi mbale utomoni, Popeza silicon ndodo guluu ndi utomoni bolodi zonse epoxy utomoni mankhwala, kufewetsa mfundo yake ali kwenikweni pakati 55 ndi 95 ℃, Ngati mfundo yofewetsa ya mphira wosanjikiza kapena utomoni. mbale ndiyotsika, imatha kutentha mosavuta panthawi yodulira ndikupangitsa kuti ikhale yofewa ndikusungunuka, Yolumikizidwa ndi waya wachitsulo ndi silicon wafer pamwamba, Chifukwa cha kuchepa kwa mzere wa diamondi, kapena zowotcha za silicon zimalandiridwa ndipo wodetsedwa ndi utomoni, Ukalumikizidwa, zimakhala zovuta kutsuka, Kuipitsidwa kotereku kumachitika pafupi ndi m'mphepete mwa chophatikizira cha silicon.

(3) silicon ufa: m'kati mwa diamondi waya kudula adzabala zambiri pakachitsulo ufa, ndi kudula, matope ozizira ufa okhutira adzakhala mochulukira, pamene ufa ndi lalikulu mokwanira, kutsatira pakachitsulo pamwamba, ndi kudula waya wa diamondi wa kukula kwa ufa wa silicon ndi kukula kwake kumapangitsa kuti adsorption yake ikhale yosavuta pamtunda wa silicon, zimapangitsa kuti zikhale zovuta kuyeretsa.Chifukwa chake, onetsetsani kuti zoziziritsa zasinthidwa ndi mtundu wake ndikuchepetsa kuchuluka kwa ufa mu choziziritsa.

(4) kuyeretsa wothandizila: ntchito yamakono opanga diamondi waya kudula makamaka ntchito matope kudula nthawi yomweyo, makamaka ntchito matope kudula prewashing, kuyeretsa ndondomeko ndi kuyeretsa wothandizila, etc., limodzi diamondi waya kudula teknoloji kuchokera kudula limagwirira, kupanga wathunthu mzere, ozizira ndi matope kudula ndi kusiyana lalikulu, kotero lolingana kuyeretsa ndondomeko, kuyeretsa wothandizila mlingo, chilinganizo, etc ayenera kukhala diamondi waya kudula kupanga lolingana kusintha.Kuyeretsa wothandizila ndi mbali yofunika, choyambirira kuyeretsa wothandizila chilinganizo surfactant, alkalinity si oyenera kuyeretsa diamondi waya kudula pakachitsulo chopingasa, ayenera pamwamba diamondi waya pakachitsulo buledi, zikuchokera ndi pamwamba zotsalira za chandamale kuyeretsa wothandizira, ndi kutenga ndi njira yoyeretsera.Monga tanena kale, kapangidwe ka defoaming wothandizira sikufunika mu kudula matope.

(5) Madzi: diamondi waya kudula, kuchapa chisanadze ndi kuyeretsa madzi osefukira ali ndi zosafunika, akhoza adsorbed pamwamba pa silicon wafer.

Chepetsani vuto lopangitsa tsitsi la velvet kukhala loyera kuwoneka ngati malingaliro

(1) Kugwiritsa ntchito choziziritsa kukhosi ndi kubalalitsidwa kwabwino, ndipo choziziritsa kuzizirira chimafunika kugwiritsa ntchito chotsitsa chotsalira chotsalira kuti muchepetse zotsalira za zinthu zoziziritsa kukhosi pamwamba pa nsalu ya silicon;

(2) Gwiritsani ntchito guluu woyenera ndi mbale ya utomoni kuti muchepetse kuipitsa kwa silicon wafer;

(3) Choziziriracho chimasungunuka ndi madzi oyera kuti atsimikizire kuti palibe zonyansa zotsalira m'madzi ogwiritsidwa ntchito;

(4) Pamwamba pa diamondi waya odulidwa silicon chotupa, ntchito ntchito ndi kuyeretsa zotsatira zoyenera kuyeretsa wothandizila;

(5) Gwiritsani ntchito njira ya diamondi yoziziritsira pa intaneti kuti muchepetse zomwe zili mu ufa wa silicon podula, kuti muzitha kuwongolera zotsalira za silicon ufa pamtunda wa silicon wafer pamwamba pa mtanda.Pa nthawi yomweyo, akhoza kuonjezera kusintha kwa kutentha kwa madzi, otaya ndi nthawi mu chisanadze kutsuka, kuonetsetsa kuti pakachitsulo ufa watsukidwa mu nthawi.

(6) Kachitsulo kakang'ono ka silicon kakayikidwa patebulo loyeretsera, liyenera kuthandizidwa nthawi yomweyo, ndikusunga chophimba cha silicon chinyowe panthawi yonse yoyeretsa.

(7) Chophika cha silicon chimapangitsa kuti pamwamba pakhale chonyowa popanga degumming, ndipo sichikhoza kuwuma mwachilengedwe.(8) Poyeretsa chophika cha silicon, nthawi yowonekera mumlengalenga imatha kuchepetsedwa momwe kungathekere kuletsa kupanga maluwa pamwamba pa silicon wafer.

(9) Ogwira ntchito yoyeretsa sayenera kukhudza mwachindunji pamwamba pa chowotcha cha silicon panthawi yonse yoyeretsa, ndipo ayenera kuvala magolovesi amphira, kuti asapange kusindikiza zala.

(10) Pofotokoza [2], mapeto a batri amagwiritsa ntchito hydrogen peroxide H2O2 + alkali NaOH kuyeretsa ndondomeko molingana ndi chiŵerengero cha voliyumu ya 1:26 (3% NaOH yankho), yomwe ingachepetse bwino zochitika za vutoli.Mfundo yake ndi yofanana ndi njira yoyeretsera ya SC1 (yomwe imadziwika kuti madzi 1) ya semiconductor silicon wafer.Njira yake yayikulu: filimu ya okosijeni pamtunda wa silicon wafer imapangidwa ndi makutidwe ndi okosijeni a H2O2, omwe amawonongeka ndi NaOH, ndipo makutidwe ndi okosijeni ndi dzimbiri zimachitika mobwerezabwereza.Choncho, particles Ufumuyo pakachitsulo ufa, utomoni, zitsulo, etc.) komanso kugwera mu kuyeretsa madzi ndi dzimbiri wosanjikiza;chifukwa cha makutidwe ndi okosijeni a H2O2, zinthu zamoyo zomwe zili pamwamba pake zimawonongeka kukhala CO2, H2O ndikuchotsedwa.Njira yoyeretserayi yakhala opanga makina opangira ma silicon omwe amagwiritsa ntchito njirayi pokonza kuyeretsa waya wa diamondi wodula monocrystalline silicon wafer, wafer wa silicon m'nyumba ndi ku Taiwan ndi opanga ma batire ena ogwiritsa ntchito madandaulo avuto loyera.Palinso opanga mabatire omwe agwiritsa ntchito njira yofananira yoyeretsera velvet, komanso kuwongolera bwino mawonekedwe a velvet woyera.Zitha kuwoneka kuti njira yoyeretserayi imawonjezedwa mu njira yoyeretsera silicon wafer kuchotsa zotsalira za silicon wafer kuti athetse bwino vuto la tsitsi loyera kumapeto kwa batri.

mapeto

Pakali pano, diamondi waya kudula wakhala waukulu processing umisiri m'munda wa single krustalo kudula, koma m'kati kulimbikitsa vuto kupanga veleveti woyera wakhala akuvutitsa pakachitsulo buledi ndi opanga batire, zikubweretsa opanga batire kuti diamondi waya kudula silikoni. chophika chimakhala ndi kukana.Kupyolera mu kusanthula koyerekeza kwa dera loyera, makamaka chifukwa cha zotsalira pamtunda wa silicon wafer.Pofuna kupewa bwino vuto la silicon wafer mu cell, pepalali likuwunika zomwe zingatheke kuwonongeka kwa silicon wafer, komanso malingaliro owongolera ndi njira zopangira.Malingana ndi chiwerengero, dera ndi mawonekedwe a mawanga oyera, zomwe zimayambitsa zikhoza kufufuzidwa ndikuwongolera.Ndikofunikira kwambiri kugwiritsa ntchito hydrogen peroxide + alkali kuyeretsa njira.Chochitika bwino chatsimikizira kuti chingalepheretse bwino vuto la diamondi waya kudula silicon mkate wopangidwa ndi velvet whitening, kuti afotokoze za makampani ambiri ndi opanga.